315 Trial manufacturing of an inner atmosphere-controllable, sealed container-type double-side CMP machine and its polishing ability
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- KITAMURA Kei
- Kyushu University
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- DOI Toshiro
- Kyushu University
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- KUROKAWA Syuhei
- Kyushu University
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- UMEZAKI Yoji
- Kyushu University
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- MATSUKAWA Yoji
- Kyushu University
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- YAMAZAKI Tsutomu
- Kyushu University
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- Ooki Yota
- Kyushu University
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- HASEGAWA Tadashi
- Kyushu University
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- KOSHIYAMA Isamu
- Koshiyama Science and Technology Foundation
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- ICHIKAWA Koichiro
- Fujikoshi Machinery Corp.
Bibliographic Information
- Other Title
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- 315 加工環境制御型密閉式両面CMP装置の設計試作とその加工特性(GS 生産加工II)
Journal
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- The Proceedings of Conference of Kyushu Branch
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The Proceedings of Conference of Kyushu Branch 2010.63 (0), 109-110, 2010
The Japan Society of Mechanical Engineers
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Keywords
Details 詳細情報について
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- CRID
- 1390001205865102976
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- NII Article ID
- 110008745310
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- ISSN
- 24242780
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- Text Lang
- ja
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- Data Source
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- JaLC
- Crossref
- CiNii Articles