書誌事項
- タイトル別名
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- OS1311 Quantitative characterization of crystallinity of grain boundaries in nano-scale and its application to the strength evaluation of polycrystalline thin films
説明
A novel evaluation method of the crystallinity of grains and grain boundaries was proposed by analyzing the quality of Kikuchi lines obtained from the conventional EBSD analysis. This method can evaluate the porous and brittle grain boundaries by IQ (Image Quality) and CI (Confidence Index) . Both IQ and CI values are the parameters which are calculated from the observed result of the Kikuchi pattern obtained from the area where electron beams penetrate during EBSD analysis. The position of the grain boundaries is determined by this CI value, and the crystallinity of the film around the grain boundaries is evaluated by the IQ value quantitatively.
収録刊行物
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- M&M材料力学カンファレンス
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M&M材料力学カンファレンス 2012 (0), _OS1311-1_-_OS1311-2_, 2012
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390001205871881216
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- NII論文ID
- 110009937448
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- ISSN
- 24242845
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
- OpenAIRE
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- 抄録ライセンスフラグ
- 使用不可