1201 On-demand factory system for MEMS

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  • Nakano Shizuka
    National Institute of Advanced Industrial Science and Technology (AIST)
  • Ashida Kiwamu
    National Institute of Advanced Industrial Science and Technology (AIST)
  • Park Jaehyuk
    National Institute of Advanced Industrial Science and Technology (AIST)
  • Akedo Jyun
    National Institute of Advanced Industrial Science and Technology (AIST)

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Other Title
  • 1201 オンデマンド型MEMS製造システムの開発(OS1-2 生産システムの運用)

Description

We propose a novel production system, that is able to on-demand and sustainable development. In the on-demand manufacturing, shortening at the development period is important. However, the micro electro-mechanical systems (MEMS) manufacturing use very large system, and development period is very long. Therefore, a new prototype manufacturing system for MEMS was proposed. The basic process of this system is press forming that is possible to process a metal, a polymer, and other sheet type materials. The vacuum deposition process was also prepared. Furthermore, post thermal process, ink jet type wiring, and device test. The system was constructed on 5 separated units. Process equipment set on the unit, and transfer system was also set on. The separated system was able to reorder the process when products were changed, and they also work stand-alone. This flexibility realizes "on-demand factory" system. In this case, "on-demand factory" means the products plan, develop, trial, manufacture and supply on markets demand. The proposed flexible process system affect all product terms.

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