20pCB-6 Development of a cascade arc plasma source and its characterization for vacuum-atmosphere interface device
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- Namba S.
- Hiroshima Univ.
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- AIMAN M. H.
- Hiroshima Univ.
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- Matsuoka L.
- Hiroshima Univ.
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- Endo T.
- Hiroshima Univ.
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- Suzuki C.
- NIFS
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- Tamura N.
- NIFS
Bibliographic Information
- Other Title
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- 20pCB-6 大気圧・真空インターフェースのためのカスケードアーク放電源の開発とその特性評価
Journal
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- Meeting Abstracts of the Physical Society of Japan
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Meeting Abstracts of the Physical Society of Japan 71.1 (0), 888-, 2016
The Physical Society of Japan
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Details 詳細情報について
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- CRID
- 1390001205958089856
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- NII Article ID
- 110010056911
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- ISSN
- 21890803
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles
