RF potential formation and two-dimensional electron velocity distribution functions in a RF Inductively Coupled Plasma
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- Fujita Hiroharu
- Saga University
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- Cicman P.
- Saga University
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- Ohtsu Yasunori
- Saga University
Bibliographic Information
- Other Title
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- 17pRA-5 高周波誘導結合型プラズマ中の高周波電位形成と電子二次元速度分布関数
Journal
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- Meeting Abstracts of the Physical Society of Japan
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Meeting Abstracts of the Physical Society of Japan 56.2.2 (0), 128-, 2001
The Physical Society of Japan
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Details 詳細情報について
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- CRID
- 1390001206040793472
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- NII Article ID
- 110002024723
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- ISSN
- 21890803
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- Text Lang
- ja
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- Data Source
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- JaLC
- CiNii Articles