書誌事項
- タイトル別名
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- S1303-2-4 Development of a high sensitive angle sensor by using a single cell photodiode
抄録
This paper describes a highly sensitive two-axis angle sensor by using a single cell photodiode for measurement of surface profiles and error motions. The sensor, which is based on the principle of the laser autocollimation, employs a laser diode as the light source. The reflected beam from the target surface is received by an autocollimation unit consisting of an objective lens and a light spot position-sensing detector located at the focal position of the lens. It is confirmed that the sensor sensitivity depends on the spot size on the focal position and a single cell photodiode is employed as the light spot position-sensing detector to sense the position of the light spot at the focal position. A prototype two-axis angle sensor with a dimensional of 65 mm (W) × 70 mm (L) × 40 mm (H) is designed and constructed. Experimental results have shown that the sensor has a sensitivity of ±3 %/arc-seconds and a resolution of ±0.03 arc-seconds.
収録刊行物
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- 年次大会講演論文集
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年次大会講演論文集 2009.4 (0), 285-286, 2009
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390001206062888064
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- NII論文ID
- 110007861928
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- ISSN
- 24331325
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可