Crystal Structures of the TiO<sub>2</sub> Films on the Quartz Substrate and the Powder formed in the Gaseous Phase by ArF Laser Photolysis of Ti(O-i-C<sub>3</sub>H<sub>7</sub>)<sub>4</sub>

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  • Watanabe Akio
    National Institute of Materials and Chemical Research, 1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
  • Tsuchiya Tetsuo
    National Institute of Materials and Chemical Research, 1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan
  • Imai Yoji
    National Institute of Materials and Chemical Research, 1-1 Higashi, Tsukuba, Ibaraki 305-8565, Japan

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  • Crystal Structures of the TiO2 Films on the Quartz Substrate and the Powder formed in the Gaseous Phase by ArF Laser Photolysis of Ti(O-i-C3H7)4.

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Decomposition of sublimed vapor of Ti-tetraisopropoxide by ArF laser has been studied by X-ray diffraction. TiO2 crystalline films (anatase) were deposited on the quartz substrate whereas the white powder of rutile was deposited on the inner wall of the chamber through a decomposition reaction in the gaseous phase. The possible reasons for the difference in the crystal structures of the deposits obtained on the substrate and in the gaseous phase are discussed.

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