Electrical and Optical Properties of In<sub>2</sub>O<sub>3</sub>–ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering

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  • Kim Hwa-Min
    Department of Physics and Semiconductor Science, Catholic University of Daegu The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)
  • Jung Sang-Kuan
    Department of Physics and Semiconductor Science, Catholic University of Daegu
  • Ahn Jeung-Sun
    The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)
  • Kang Young-Jin
    The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)
  • Je Koo-Chul
    The School of Materials Science, Japan Advanced Institute of Science and Technology (JAIST)

書誌事項

タイトル別名
  • Electrical and Optical Properties of In2O3-ZnO Films Deposited on Polyethylene Terephthalate Substrates by Radio Frequency Magnetron Sputtering.
公開日
2003
DOI
  • 10.1143/jjap.42.223
公開者
The Japan Society of Applied Physics

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説明

Using a In2O3 and ZnO powder mixture with a ratio of 95:5 in wt% as a target, highly transparent conducting oxide (TCO) films are prepared on polyethylene terephthalate (PET) substrates by rf-magnetron sputtering. These films have amorphous structures with excellent electrical stability, surface uniformity and adhesion to the PET substrate and can be prepared at room temperature. In particular, In2O3–ZnO (IZO) films directly deposited on PET without a hard-coated layer have nearly similar electrical properties, higher transmittance and a more uniform surface in comparison with those deposited on a hard-coated layer of PET. When a TCO material is deposited on PET, IZO is more suitable than indium tin oxide (ITO) in several aspects such as the optical, electrical, and etching properties and its surface uniformity.

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