Improved characteristics of blue and green InGaN‐based light‐emitting diodes on Si grown by metalorganic chemical vapor deposition

DOI Web Site 被引用文献33件 参考文献9件
  • Egawa Takashi
    Research Center for Micro-Structure Devices, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
  • Moku Tetsuji
    Semiconductor Research and Development, Sanken Electric Co., Ltd., Kitano, Niiza 352-8666, Japan
  • Ishikawa Hiroyasu
    Research Center for Micro-Structure Devices, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan
  • Ohtsuka Kouji
    Semiconductor Research and Development, Sanken Electric Co., Ltd., Kitano, Niiza 352-8666, Japan
  • Jimbo Takashi
    Research Center for Micro-Structure Devices, Nagoya Institute of Technology, Gokiso-cho, Showa-ku, Nagoya 466-8555, Japan

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タイトル別名
  • Improved Characteristics of Blue and Green InGaN-Based Light-Emitting Diodes on Si Grown by Metalorganic Chemical Vapor Deposition.

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抄録

We report significantly improved characteristics of InGaN multiple-quantum well blue and green light-emitting diodes (LEDs) on Si (111) substrates using metalorganic chemical vapor deposition. A high-temperature-grown thin AlN layer and AlN/GaN multilayers have been used for the growth of high-quality active layer on Si substrate. The blue LED on Si exhibited an operating voltage of 4.1 V, a series resistance of 30 Ω, an optical output power of 18 μW and a peak emission wavelength of 478 nm with a full width at half maximum of 22 nm at 20 mA drive current. These characteristics are comparable to those of LED on sapphire substrate. The green LED was also fabricated on Si substrate successfully.

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詳細情報 詳細情報について

  • CRID
    1390001206256842752
  • NII論文ID
    210000052857
    110006349692
    130004529762
  • NII書誌ID
    AA10650595
  • DOI
    10.1143/jjap.41.l663
  • ISSN
    13474065
    00214922
    http://id.crossref.org/issn/13474065
    http://id.crossref.org/issn/00214922
  • Web Site
    http://stacks.iop.org/1347-4065/41/i=6B/a=L663/pdf
  • 本文言語コード
    en
  • データソース種別
    • JaLC
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    • CiNii Articles
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    使用不可

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