Analysis of Defects in Polycrystalline Silicon Thin Films Using Raman Scattering Spectroscopy
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- Kitahara Kuninori
- Interdisciplinary Faculty of Science and Engineering, Shimane University
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- Ohnishi Kazuma
- Interdisciplinary Faculty of Science and Engineering, Shimane University
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- Katoh Yoshihiro
- Interdisciplinary Faculty of Science and Engineering, Shimane University
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- Yamazaki Ryosuke
- Interdisciplinary Faculty of Science and Engineering, Shimane University
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- Kurosawa Toshitaka
- Komatsu Ltd.
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Abstract
We investigated defects in polycrystalline silicon (poly-Si) for thin-film transistors using Raman-scattering spectroscopy, where poly-Si films were fabricated by solid-phase crystallization (SPC) and excimer-laser annealing (ELA). Defects were characterized by the optical-phonon mode at ∼520 cm−1 and local-vibration modes (LVMs). LVMs were induced by termination of dangling bonds at defects with hydrogen atoms using a catalytic-hydrogenation technique. Two dominant LVMs of Si–H bond stretching modes were detected for poly-Si films at 2000 and 2100 cm−1. The 2000 cm−1 band was attributed to dangling bonds at grain boundaries. The dangling bonds are identical to those observed by electron spin resonance. The 2100 cm−1 band was detected only for ELA and related to atomic vacancies left by rapid cooling after laser irradiation. It was shown that the width of the optical-phonon mode is enlarged by the presence of intragrain defects and correlates with the 2100 cm−1 band intensity in some cases. The relationship between dangling bonds and ordering of amorphous Si at the initial stage of SPC was also shown.
Journal
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 42 (11), 6742-6747, 2003
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390001206264516480
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- NII Article ID
- 210000054365
- 10012563529
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- NII Book ID
- AA10457675
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- ISSN
- 13474065
- 00214922
- http://id.crossref.org/issn/13474065
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- NDL BIB ID
- 6751929
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- Text Lang
- en
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed