Fabrication of Zn-Indiffused LiNbO<sub>3</sub> Optical Waveguides by Diffusing Sol–Gel Spin-Coated ZnO Film at Low-Pressure Atmosphere
-
- Senthil Selvan Jayaraman
- Department of Electronic Engineering, Graduate School of Engineering, Osaka University
-
- Fujimura Masatoshi
- Department of Electronic Engineering, Graduate School of Engineering, Osaka University
-
- Suhara Toshiaki
- Department of Electronic Engineering, Graduate School of Engineering, Osaka University
書誌事項
- タイトル別名
-
- Fabrication of Zn-Indiffused LiNbO3 Optical Waveguides by Diffusing Sol-Gel Spin-Coated ZnO Film at Low-Pressure Atmosphere
この論文をさがす
説明
Planar and channel waveguides supporting both extraordinary and ordinary polarization modes were fabricated by diffusing sol–gel spin-coated ZnO film into Z-cut congruent LiNbO3 at low-pressure atmosphere. The waveguide showing propagation losses of 0.2±0.1 dB/cm for extraordinary and 0.7±0.2 dB/cm for ordinary polarization modes at 1.5 μm wavelength was fabricated by diffusing 330 nm ZnO film at 890°C for 4 h in a low-pressure of 1 Torr. The effect of spin-coated ZnO film thickness and diffusion conditions on the waveguiding properties are discussed.
収録刊行物
-
- Japanese Journal of Applied Physics
-
Japanese Journal of Applied Physics 43 (8A), 5313-5315, 2004
The Japan Society of Applied Physics
- Tweet
詳細情報 詳細情報について
-
- CRID
- 1390001206266102272
-
- NII論文ID
- 10013470086
- 30021855211
- 210000056141
- 130004532725
-
- NII書誌ID
- AA10457675
-
- ISSN
- 13474065
- 00214922
-
- NDL書誌ID
- 7051466
-
- 本文言語コード
- en
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可