Heavily Boron-Doped Silicon Single Crystal Growth: Constitutional Supercooling
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- Taishi Toshinori
- Faculty of Education, Shinshu University, Nishinagano, Nagano 380-8544, Japan
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- Huang Xinming
- Faculty of Education, Shinshu University, Nishinagano, Nagano 380-8544, Japan
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- Kubota Masayoshi
- Sumitomo Metal Mining Co., Ltd, Suehirocho, Ome 198-0025, Japan
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- Kajigaya Tomio
- Sumitomo Metal Mining Co., Ltd, Suehirocho, Ome 198-0025, Japan
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- Fukami Tatsuo
- Faculty of Engineering, Shinshu University, Wakasato, Nagano 380-8553, Japan
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- Hoshikawa Keigo
- Faculty of Education, Shinshu University, Nishinagano, Nagano 380-8544, Japan
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抄録
Constitutional supercooling in the heavily boron-doped Czochralski (CZ) silicon crystal growth has been investigated. It was found that cellular growth occurred first in the center of the crystal. The cellular growth changed gradually to facet growth and finally became polycrystalline growth. This process is quite different from the well-known mechanism of polycrystallization in the silicon crystal growth. The cellular growth occurred when the boron concentration in the crystal was approximately 3 × 1020 atoms/cm3 with the growth rate of about 1 mm/min. In the theoretical analysis using an equation for occurrence of the constitutional supercooling, it is found that the condition for the occurrence is satisfied by considering that the segregation coefficient of boron decreases with increasing boron concentration in the heavily boron-doped silicon crystal growth.
収録刊行物
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- Japanese Journal of Applied Physics
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Japanese Journal of Applied Physics 39 (1AB), L5-L8, 2000
The Japan Society of Applied Physics
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詳細情報 詳細情報について
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- CRID
- 1390001206270665600
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- NII論文ID
- 110003928543
- 210000048512
- 130004526948
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- NII書誌ID
- AA10650595
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- ISSN
- 13474065
- 00214922
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- NDL書誌ID
- 4974922
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可