書誌事項
- タイトル別名
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- Effects of pre-treatments of substrates on synthesis of diamond thin films.
- ダイヤモンド ハクマク ケイセイ ニ オヨボス キバン ノ マエショリ コウカ
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説明
In the present study, we investigated deposition of diamond films on both Si substrates pre-treated with diamond powder by an ultrasonic vibrator and also further ion-implanted. The pre-treatment with diamond powders increased a density of diamond nucleation on Si substrate by five-order of magnitude against to the untreated substrate. 280keV Ar+ ion implantation at 90K to the pre-treated substrate significantly reduced the density of the diamond nucleation while the implantation at 773K scarcely affected the density. It is proposed that healing of micro-flaws, which are thought to work as the nucleation sites, is an important mechanism to reduce the diamond nucleation density by ion implantation.
収録刊行物
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- 粉体および粉末冶金
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粉体および粉末冶金 36 (2), 139-142, 1989
一般社団法人 粉体粉末冶金協会
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詳細情報 詳細情報について
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- CRID
- 1390001206307761280
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- NII論文ID
- 130000813533
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- NII書誌ID
- AN00222724
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- ISSN
- 18809014
- 05328799
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- NDL書誌ID
- 3236153
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可