書誌事項
- タイトル別名
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- Measurements of Electron Attenuation Length using Metallic Multilayers.
説明
We propose a new method for experimentally measuring the electron attenuation length in solid from Auger electron spectroscopic analysis on the aslant-smoothed surface of a metallic multilayer system. The demonstration is performed for the electrons with kinetic energies corresponding to Auger transitions using a ring pattern sputtered surface of Fe and Si02 multilayers. The obtained attenuation lengths are qualitatively in good agreement with the Seah-Dench formalism as well as the TPP-2 formalism for a kinetic energy region of 50 to 1600eV. The experimental values are quantitatively larger than the theoretical ones for Si02, but smaller than those for Fe.
収録刊行物
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- 表面科学
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表面科学 16 (8), 492-496, 1995
公益社団法人 日本表面科学会
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詳細情報 詳細情報について
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- CRID
- 1390001206455947392
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- NII論文ID
- 130003683552
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- ISSN
- 18814743
- 03885321
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可
