球面収差補正TEMを中心とする技術

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タイトル別名
  • Spherical Aberration Correction in TEM
  • キュウメン シュウサ ホセイ TEM オ チュウシン ト スル ギジュツ

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抄録

Although developed to improve spatial resolution, a TEM spherical aberration corrector or ‘image corrector’ has the added benefit of eliminating the artifact of delocalization in HR-TEM imaging. This greatly increases the power of HRTEM imaging and is especially important for clear imaging of surfaces and interfaces. When such a corrector is combined with a source monochromator, ultra high resolution at low accelerating voltages also becomes feasible. These technologies can also be added to an environmental TEM (ETEM) to achieve unprecedented resolution on TEM samples in gaseous environments. Some recent results illustrating the power of image corrected TEM and how it is being used at the cutting edge of materials science are presented.

収録刊行物

  • 表面科学

    表面科学 34 (5), 234-239, 2013

    公益社団法人 日本表面科学会

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