書誌事項
- タイトル別名
-
- Recent Applications of Auger Electron Spectroscopy
- オージェ電子分光法の最近の活用事例 : 絶縁物分析と化学状態分析
- オージェ デンシ ブンコウホウ ノ サイキン ノ カツヨウ ジレイ : ゼツエンブツ ブンセキ ト カガク ジョウタイ ブンセキ
- —絶縁物分析と化学状態分析—
- —Non-Conductive Sample Analysis and Chemical State Analysis—
この論文をさがす
抄録
AES and XPS have been used to analyze the top surface of a solid sample for a long time. In late years scientific reports including an AES result became less than those of XPS year by year. It originates in superior several points of XPS; easy non-conductive sample analysis, quantitative analysis with higher accuracy, and excellent chemical state analysis. However, AES can acquire additional information from a minute area of a few tens of nm, which cannot be attainable by XPS. It was usually very important to understand a true sample surface condition more deeply. We have done lots of Auger applications for a long time, in order to extend AES capability to analyze many kinds of samples. In this report, we introduce recent applications of AES; non-conductive sample analysis and chemical state analysis. They are useful techniques and can be applied to many practical samples.
収録刊行物
-
- 表面科学
-
表面科学 37 (4), 156-161, 2016
公益社団法人 日本表面科学会
- Tweet
キーワード
詳細情報 詳細情報について
-
- CRID
- 1390001206459607808
-
- NII論文ID
- 130005146513
-
- NII書誌ID
- AN00334149
-
- ISSN
- 18814743
- 03885321
-
- NDL書誌ID
- 027281506
-
- 本文言語コード
- ja
-
- データソース種別
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- 抄録ライセンスフラグ
- 使用不可