書誌事項
- タイトル別名
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- Effects of Cleaning Speed of Ultrasonic Cleaning in Microbubble with Surfactant
抄録
<p>In recent years, there is an increasing expectation for quality improvement of electronic products such as precision machines and semiconductor wafers. Further cleaning techniques with higher precision and lower environmental burden are required, so various methods have been proposed. Until now authors have been studying ultrasonic cleaning but found that cleaning with ultrasonic waves has the problem of lowering detergency with long washing depending on frequency. To solve this problem, we attempted to use microbubbles and a surfactant in combination for ultrasonic cleaning. As a result, it became clear that washing can be carried out more efficiently by using a surfactant at low frequency, and it can be cleaned at a high frequency by using microbubbles at the same time without remaining oil amount being constant.</p>
収録刊行物
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- 日本機械学会関東支部総会講演会講演論文集
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日本機械学会関東支部総会講演会講演論文集 2018.24 (0), GS0305-, 2018
一般社団法人 日本機械学会
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詳細情報 詳細情報について
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- CRID
- 1390001288071135104
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- NII論文ID
- 130007486449
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- ISSN
- 24242691
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可