Identification of Background in CMA
-
- Alkafri Adel
- Nagoya Institute of Technology (NIT)
-
- Goto K.
- Advanced Industrial Science and Technology (AIST)
-
- Ichikawa Y.
- Nagoya Institute of Technology (NIT)
-
- Shimizuc R.
- Osaka Institute of Technology (OIT)
Search this article
Description
<p> We studied the background in electron spectroscopy that was caused by the scattering of signal electrons in the specific cylindrical mirror analyzer (CMA) developed for absolute Auger electron spectroscopy. For this, a mini-electron gun was set at a sample position to calibrate the trajectories of signal electrons in the CMA. The electron beam current (iin) entering the CMA was measured using a retractable Faraday cup and the detected current (iout) was measured using another Faraday cup (normally used for detecting Auger electrons). It was revealed that the two meshes spun in the inner cylindrical electrode act as micro lenses for signal electrons, significantly deteriorating the CMA characteristics by the deflection and scattering of the signal electrons in the CMA. The measured energy spectra demonstrated the excellent performance of electron spectrometry with a signal to noise ratio of ~107.</p>
Journal
-
- Journal of Surface Analysis
-
Journal of Surface Analysis 14 (2), 95-103, 2007
The Surface Analysis Society of Japan
- Tweet
Details 詳細情報について
-
- CRID
- 1390001288082872960
-
- NII Article ID
- 130007499544
-
- NII Book ID
- AA11448771
-
- ISSN
- 13478400
- 13411756
-
- NDL BIB ID
- 9341620
-
- Text Lang
- en
-
- Data Source
-
- JaLC
- NDL
- Crossref
- CiNii Articles
-
- Abstract License Flag
- Disallowed