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- Alkafri Adel
- Nagoya Institute of Technology (NIT)
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- Goto K.
- Advanced Industrial Science and Technology (AIST)
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- Ichikawa Y.
- Nagoya Institute of Technology (NIT)
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- Shimizuc R.
- Osaka Institute of Technology (OIT)
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説明
<p> We studied the background in electron spectroscopy that was caused by the scattering of signal electrons in the specific cylindrical mirror analyzer (CMA) developed for absolute Auger electron spectroscopy. For this, a mini-electron gun was set at a sample position to calibrate the trajectories of signal electrons in the CMA. The electron beam current (iin) entering the CMA was measured using a retractable Faraday cup and the detected current (iout) was measured using another Faraday cup (normally used for detecting Auger electrons). It was revealed that the two meshes spun in the inner cylindrical electrode act as micro lenses for signal electrons, significantly deteriorating the CMA characteristics by the deflection and scattering of the signal electrons in the CMA. The measured energy spectra demonstrated the excellent performance of electron spectrometry with a signal to noise ratio of ~107.</p>
収録刊行物
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- Journal of Surface Analysis
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Journal of Surface Analysis 14 (2), 95-103, 2007
一般社団法人 表面分析研究会
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詳細情報 詳細情報について
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- CRID
- 1390001288082872960
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- NII論文ID
- 130007499544
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- NII書誌ID
- AA11448771
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- ISSN
- 13478400
- 13411756
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- NDL書誌ID
- 9341620
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可