Coincidence Measurement Study of Secondary-Ion Emission from Solid Surfaces Excited with Multi-Charge Ions(Current Topics)

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Other Title
  • 同時計測法で探る多価イオン励起固体表面からの二次イオン放出(最近の研究から)
  • 同時計測法で探る多価イオン励起固体表面からの二次イオン放出
  • ドウジ ケイソクホウ デ サグル タカ イオンレイキコタイ ヒョウメン カラ ノ 2ジ イオン ホウシュツ

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Abstract

When a multi-charge ion approaches some solid surfaces, electron transfer from the surface to the ion causes secondary-ion emission. This is called potential sputtering. However, the details of the atomic processes have not been clarified. A coincidence measurement between reflected and secondary ions was conducted to study the atomic processes. The relationship between desorption-induced by electronic transitions (DIET) and the following ion scattering process was clarified. The results provided new information about potential sputtering.

Journal

  • Butsuri

    Butsuri 65 (8), 629-633, 2010-08-05

    The Physical Society of Japan

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