分子動力学シミュレーションを用いたアルミナアブレーションプルームからの堆積物組成推定

DOI オープンアクセス

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タイトル別名
  • Estimation of Composition of Deposited Products from Alumina Ablation Plume Using Molecular Dynamics Simulation

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説明

Molecular dynamics simulations were performed to estimate the composition of deposited products from alumina ablation plume at the atomic level. The parameters considered were the Al/O ratio of ablation plume and the temperatures of ablation plume and recovery plate surface. Simulation results showed that oxygen-deficient alumina was formed on the recovery plate surface, whose Al/O ratio was in good agreement with the composition of oxygen-deficient alumina obtained in the experiment. The simulation results also showed that the Al/O ratio of the deposited layer could be increased when the Al/O ratio of the alumina ablation plume was larger and the temperature of the recovery plate surface was higher. These results suggest that the Al/O ratio can be increased by repeated process of laser ablation and deposition of ablation plume, and the relationship between the Al/O ratio and the number of repetitions of this process was modeled and evaluated.

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詳細情報 詳細情報について

  • CRID
    1390010457687241344
  • DOI
    10.34377/aps.29.2_51
  • ISSN
    24351555
    13403214
  • 本文言語コード
    ja
  • 資料種別
    journal article
  • データソース種別
    • JaLC
    • KAKEN
  • 抄録ライセンスフラグ
    使用不可

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