Sputtering epitaxial growth of NbN ultrathin films on AlN
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- Kobayashi Atsushi
- The Univ. of Tokyo
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- Ueno Kohei
- The Univ. of Tokyo
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- Fujioka Hiroshi
- The Univ. of Tokyo
Bibliographic Information
- Other Title
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- スパッタ法によるAlN上へのNbN極薄膜エピタキシャル成長
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 3086-3086, 2020-02-28
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390010765190803584
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC