Investigation of the growth mechanism of PZT films on sputtering method
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- Murase Mikio
- Osaka Pref. Univ.
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- Yoshimura Takeshi
- Osaka Pref. Univ.
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- Fujimura Norifumi
- Osaka Pref. Univ.
Bibliographic Information
- Other Title
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- スパッタ法におけるPZT薄膜の成長機構の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2020.1 (0), 1242-1242, 2020-02-28
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390010765206244224
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC