High-speed Deposition of Graphite-like Carbon Film by Microwave Surface-Wave Plasma
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- BAE Hansin
- Nagoya Univ.
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- Hikita Kazuya
- Nagoya Univ.
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- Suzuki Haruka
- Nagoya Univ. cLPS
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- Sasai Kensuke
- cLPS
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- Toyoda Hirotaka
- Nagoya Univ. cLPS NIFS
Bibliographic Information
- Other Title
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- 表面波プラズマによるグラファイトライクカーボン膜の高速成膜
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 1472-1472, 2021-02-26
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390010997572430720
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC