Study on the crystal growth conditions of non-polar AlN on Si for GaN template substrate
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- Morita Masaya
- Meiji Univ. NIMS
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- Ishibashi Keiji
- COMET Inc.
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- Takahashi Kenichiro
- COMET Inc.
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- Chikyow Toyohiro
- NIMS
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- Ogura Atsushi
- Meiji Univ. MREL
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- Nagata Takahiro
- NIMS
Bibliographic Information
- Other Title
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- GaNテンプレート基板のためのSi基板上無極性面AlN結晶成長の作製条件の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.1 (0), 2611-2611, 2021-02-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390010997572712448
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC