Observation of interface state density distribution in macrostepped SiO<sub>2</sub>/SiC using local-DLTS
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- Hosaka Anna
- Tohoku Univ.
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- Yamasue Kohei
- Tohoku Univ.
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- Woerle Judith
- ETH Zurich Paul Scherrer Institute
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- Bongiorno Corrado
- CNR-IMM
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- Ferro Gabriel
- Lyon Univ.
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- Grossner Ulrike
- ETH Zurich
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- Camarda Massimo
- ETH Zurich Paul Scherrer Institute
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- Yasuo Cho
- Tohoku Univ.
Bibliographic Information
- Other Title
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- 局所DLTS法を用いたマクロステップを有するSiCにおける界面準位密度分布の測定
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 3629-3629, 2019-09-04
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390011340284676864
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC