TCAD Simulation of Phonon Thermal Transport in MOSFETs on the Basis of Boltzmann Equation
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- Hattori Junichi
- AIST
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- Ikegami Tsutomu
- AIST
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- Fukuda Koichi
- AIST
Bibliographic Information
- Other Title
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- MOSFETにおけるフォノン熱輸送のボルツマン方程式に基づくTCADシミュレーション
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 2988-2988, 2019-09-04
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390011340292283136
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC