Consideration of the determining mechanism of oxygen solubility in a Si crystal
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- Kamiyama Eiji
- GlobalWafers Japan Co., Ltd.
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- Sueoka Koji
- Okayama Pref. Univ.
Bibliographic Information
- Other Title
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- シリコン結晶中における酸素固溶度を決定するメカニズムの考察
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.2 (0), 3683-3683, 2019-09-04
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390011340292438784
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
