Design Concept of Impurity Layers’ Configurations in 3-Dimensional SiC MOSFETs
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- Hisamoto Digh
- Hitachi, Ltd.
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- Tega Naoki
- Hitachi, Ltd.
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- Tani Kazuki
- Hitachi, Ltd.
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- Suto Takeru
- Hitachi, Ltd.
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- Mori Yuki
- Hitachi, Ltd.
Bibliographic Information
- Other Title
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- 3次元SiC－MOSFETにおける不純物層設計技術
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2019.1 (0), 216-216, 2019-02-25
The Japan Society of Applied Physics
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Details 詳細情報について
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- CRID
- 1390011727208548352
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC