Face-to-face annealing of AlN films grown by MOVPE
-
- Tanaka Shuichi
- Mie Univ., Grad. School of Engineering
-
- Okada Shunsuke
- Mie Univ., Grad. School of Engineering
-
- Hayashi Yusuke
- Mie Univ., Grad. School of Regional Innovation Studies
-
- Miyake Hideto
- Mie Univ., Grad. School of Engineering Mie Univ., Grad. School of Regional Innovation Studies
-
- Hiramatsu Kazumasa
- Mie Univ., Grad. School of Engineering
Bibliographic Information
- Other Title
-
- MOVPE法によるAlN膜のface-to-faceアニール
Journal
-
- JSAP Annual Meetings Extended Abstracts
-
JSAP Annual Meetings Extended Abstracts 2017.2 (0), 3412-3412, 2017-08-25
The Japan Society of Applied Physics
- Tweet
Details 詳細情報について
-
- CRID
- 1390012468133789056
-
- ISSN
- 24367613
-
- Text Lang
- ja
-
- Data Source
-
- JaLC