Theoretical Studies on the R.F.Field Distribution of the Inductively Coupled Radio Frequency Discharge

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  • 誘導結合型高周波放電の電界分布に関する理論的研究
  • ユウドウ ケツゴウガタ コウシュウハ ホウデン ノ デンカイ ブンプ ニ カンスル リロンテキ ケンキュウ

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A inductively or capacitively coupled radio frequency discharge is being applied to the plasma CVD etc. After that, radio frequency discharge is called r.f. discharge. This r.f. discharge discharges using the r.f. electric field. In a inductively coupled r.f. discharge, a high-frequency work coil of several turns is wound around cylindrical discharge tube. In this paper, the distribution of the r.f. electric field to the discharge tube direction of the radius is being reported to have been theoretically sought using Maxwell's electromagnetic equation.

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