In-situ stress observation of Si(111)7×7 reconstruction during Ge/Si heteroepitaxial growth
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- Uozumi Yuki
- JAEA Hitachi Power Solutions
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- Yamazaki Tatsuya
- Eiko Enjineering
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- Asaoka Hidehito
- JAEA
Bibliographic Information
- Other Title
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- Ge/Si(111)ヘテロエピタキシャル成長過程におけるSi(111)7×7表面再構成ストレスのその場観察
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2014.2 (0), 1351-1351, 2014-09-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390014945747575680
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC