Electrical characteristics influenced by interfacial voids of directly-bonded InP/Si substrate
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- Kanaya Yoshinori
- Sophia Univ.
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- Matsumoto Keiichi
- Sophia Univ.
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- Kishikawa Junya
- Sophia Univ.
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- Shimomura Kazuhiko
- Sophia Univ.
Bibliographic Information
- Other Title
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- 直接貼付InP/Si基板接合界面におけるボイドによる電気特性への影響
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2014.2 (0), 3161-3161, 2014-09-01
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390014945748992000
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC