書誌事項
- タイトル別名
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- Evaluation of Thermoelectric Voltage of Monolithically-Integrated Core-Shell Si Nanowire Bridges
抄録
<p>In order to clarify an effect of core-shell structuring on the thermoelectric properties of silicon nanowires (SiNWs), a new evaluation device with monolithic integration of bottom-up-grown SiNWs was developed, and Al2O3-shell-coated p-type SiNWs were evaluated. In fabrication, SiNWs bridge structures were successfully formed with a high yield of 61% on desired local region, by employing VLS processes combined with surface nanoholes formation. Evaluated resistivity and Seebeck coefficient of the core-shell SiNW bridges were 7.6 Ω·cm and 0.61 mV/K, respectively. The Seebeck coefficient was compared with those of p-type bulk and nano Si structures to discuss effect of core-shell structuring.</p>
収録刊行物
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- 電気学会論文誌Ｅ（センサ・マイクロマシン部門誌）
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電気学会論文誌Ｅ（センサ・マイクロマシン部門誌） 143 (7), 185-191, 2023-07-01
一般社団法人 電気学会
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詳細情報 詳細情報について
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- CRID
- 1390015191520371584
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- ISSN
- 13475525
- 13418939
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- Crossref
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- 抄録ライセンスフラグ
- 使用不可