Interfacial Behavior Between Mold Resin and Sputtered Film Deposited on Electromagnetic Shield Packages

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  • HOMMA Soichi
    Memory Packaging Development Department, Kioxia Corporation Division of Materials and Manufacturing Science, Graduate School of Engineering, Osaka University
  • OKADA Daichi
    Memory Packaging Engineering Department, Kioxia Corporation
  • SAWANOBORI Akihito
    Memory Packaging Development Department, Kioxia Corporation
  • YAMAMOTO Susumu
    Memory Packaging Development Department, Kioxia Corporation
  • IMOTO Takashi
    Memory Packaging Development Department, Kioxia Corporation
  • NISHIKAWA Hiroshi
    Joining and Welding Research Institute, Osaka University

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Other Title
  • 電磁波シールドパッケージにおけるモールド樹脂とスパッタ成膜間の界面挙動
  • デンジハ シールドパッケージ ニ オケル モールド ジュシ ト スパッタセイマク カン ノ カイメン キョドウ

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Description

Many studies have examined electromagnetic shield packages for preventing electromagnetic interference, and several have discussed adhesion between the mold resin and the electromagnetic wave shielding film. In this study, we investigated the interfacial behavior between mold resin and sputtered stainless steel film as an electromagnetic wave shielding film. Two mold resin samples with different amounts of SiO2 filler formed on an organic wiring substrate were plasma etched with different gas flow ratios of Ar and N2. After etching, stainless steel film and Cu film were formed on the mold resin by sputtering. Adhesion was evaluated by the crosscut method. The results showed that adhesion between the mold resin and the sputtered stainless steel film improved as the exposure of the SiO2 filler increased and as the N2/（Ar + N2） gas flow ratio in the etching gas was increased. As the N2/（Ar + N2） gas flow rate ratio increased, the amount of resin etched increased, exposing more SiO2 filler. XPS analysis showed that this increased adhesion by enabling polar interactions between metal atoms and amino group nitrogen atoms. IR reflow after moisture absorption decreased the amount of nitrogen at the interface, breaking the metal-nitrogen polar interaction and oxidizing the metal, resulting in reduced adhesion.

Journal

  • Journal of Smart Processing

    Journal of Smart Processing 12 (5), 291-298, 2023-09-10

    Smart Processing Society for Materials, Environment & Energy (High Temperature Society of Japan)

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