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EOT=0.5nmに向けたTaSi<sub>2</sub>/La<sub>2</sub>O<sub>3</sub>/CeO<sub>x</sub>ゲートスタック構造の検討
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2010.1 (0), 2802-2802, 2010-03-03
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390017975918871936
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC