Optimization of furnace temperature distribution in SiC sublimation process using machine learning
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- Inoue Yoshiki
- Nagoya Univ.
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- Furusho Tomoaki
- IMaSS Nagoya Univ.
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- Kutsukake Kentaro
- IMaSS Nagoya Univ. AIP RIKEN
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- Harada Shunta
- Nagoya Univ. IMaSS Nagoya Univ.
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- Tagawa Miho
- Nagoya Univ. IMaSS Nagoya Univ.
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- Ujihara Toru
- Nagoya Univ. IMaSS Nagoya Univ. GAN-OIL AIST
Bibliographic Information
- Other Title
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- SiC昇華法における機械学習を用いた炉内温度分布最適化
Journal
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- JSAP Annual Meetings Extended Abstracts
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JSAP Annual Meetings Extended Abstracts 2021.2 (0), 3021-3021, 2021-08-26
The Japan Society of Applied Physics
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Keywords
Details 詳細情報について
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- CRID
- 1390020132252078976
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- ISSN
- 24367613
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- Text Lang
- ja
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- Data Source
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- JaLC
