Analysis of the Plasma Surface Modification Mechanism by Using the Plasma Diagnosis.
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- KATOH Masaaki
- Gunma College of Technology
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- TAKAHASHI Akiko
- Gunma College of Technology
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- MIYASHITA Kiyoshi
- Gunma Prefectural Industrial Technology Research Laboratory
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- OHTE Takeo
- Gunma College of Technology
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- OHTANI Sugio
- Tokai University
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- KOJIMA Akira
- Gunma College of Technology
Bibliographic Information
- Other Title
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- 発光分光法を用いた窒素プラズマによるガラス状炭素の表面改質機構の解明
- ハッコウ ブンコウホウ オ モチイタ チッソ プラズマ ニヨル ガラスジョウ
Search this article
Journal
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- Shinku
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Shinku 40 (5), 442-445, 1997
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679040119808
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- NII Article ID
- 10001958960
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 4247800
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles