Improvement of Radio Frequency Current Measurement for Inductive Coupled Plasma and its Applications.

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  • KAWATA Hiroaki
    Department of Physics and Electronics, College of Engineering, Osaka Prefecture University
  • IYANAGA Hidetomo
    Department of Physics and Electronics, College of Engineering, Osaka Prefecture University
  • MATSUNAGA Takashi
    Department of Physics and Electronics, College of Engineering, Osaka Prefecture University
  • MURATA Kenji
    Department of Physics and Electronics, College of Engineering, Osaka Prefecture University

Bibliographic Information

Other Title
  • 誘導結合型プラズマにおける高周波電流測定の改善とその応用
  • ユウドウ ケツゴウガタ プラズマ ニ オケル コウシュウハ デンリュウ ソクテイ ノ カイゼン ト ソノ オウヨウ

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Abstract

Both the current flowing through an antenna coil and the voltage supplied to the coil were measured for Ar inductive coupled plasmas (ICP) at a pressure of 13 Pa. By using the cancel circuit we measured the difference of the antenna coil currents between no plasma load and ICP. The measurement system was improved in order to reduce both radio frequency (RF) noises and waveform distortions. The impedance is presented when the cancel circuit is used. A simple method to obtain the value of the coupling coefficient is presented. The current measured with the cancel circuit could be related to the plasma current much better than that without the cancel circuit. The values of the coupling coefficient increased as the RF power increased, and ranged between 0.3 and 0.5 in our experiment.

Journal

  • Shinku

    Shinku 43 (3), 357-360, 2000

    The Vacuum Society of Japan

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