Hardness and Adhesion Strength Enhancement by Compositional Gradient Structure and Optimization of Ar Partial Pressure for ZrN/Zr/ZrO2 and ZrN/ZrO2 Films Deposited by Reactive Sputtering.
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- ICHIYAMA Masanori
- AMSRC, Kanazawa Institute of Technology
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- SAWAHIRA Yosihiro
- AMSRC, Kanazawa Institute of Technology
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- KURODA Yasunobu
- AMSRC, Kanazawa Institute of Technology
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- 佐藤 彰繁
- 金沢工業大学AMSRC
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- KITAGAWA Masaru
- AMSRC, Kanazawa Institute of Technology
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- KIKUTI Naoto
- AMSRC, Kanazawa Institute of Technology
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- KUSANO Eiji
- AMSRC, Kanazawa Institute of Technology
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- NANTO Hidehito
- AMSRC, Kanazawa Institute of Technology
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- KINBARA Akira
- AMSRC, Kanazawa Institute of Technology
Bibliographic Information
- Other Title
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- 組成傾斜構造とAr圧がZrN/Zr/ZrO2とZrN/ZrO2膜の硬さ及び付着力に与える影響
- ソセイ ケイシャ コウゾウ ト Arアツ ガ ZrN Zr ZrO2 ト ZrN ZrO2 マク ノ カタサ オヨビ フチャクリョク ニ アタエル エイキョウ
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Abstract
Effects of compositionally gradient structure and discharge gas pressure on microhardness and adhesion of ZrN/Zr/ ZrO2/substrate and ZrN/ZrO2/substrate films have been studied. The apparatus used to deposit the films was an UHV-type sputtering machine with a Zr magnetron cathode. The compositional graduation of the films was formed by changing reactive gas flow rate gradually for a constant discharge current in the reactive sputtering. For film prepared, microhardness and adhesion strength were examined. The highest hardness was achieved for a ZrN/ZrO2 film with a gradient interlayer deposited at an Ar partial pressure of 0.4 Pa. The ZrN/ZrO2 or ZrN/Zr/ZrO2 films with interrupted interfaces showed lower microhardnesses compared to the films with gradient interfaces. Although the adhesion strength increased as Ar partial pressure increased, the microhardness decreased. Thus, it was concluded from the experimental results obtained that the ZrN/ZrO2 films with gradient interfaces deposited at a low Ar pressure yielded a high performance as a hard coating.
Journal
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- Shinku
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Shinku 42 (3), 167-170, 1999
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679040377856
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- NII Article ID
- 10002476213
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 4714254
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- Abstract License Flag
- Disallowed