Generation of High-density Plasma by Microwaves Propagating Along Metal Surface

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  • KOUSAKA Hiroyuki
    Department of Mechanical Science and Engineering, Graduate School of Engineering Nagoya University
  • IIDA Hitoshi
    Department of Mechanical Science and Engineering, Graduate School of Engineering Nagoya University
  • UMEHARA Noritsugu
    Department of Mechanical Science and Engineering, Graduate School of Engineering Nagoya University

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Other Title
  • 金属体に沿って伝搬するマイクロ波による高密度プラズマ生成
  • キンゾクタイ ニ ソッテ デンパン スル マイクロハ ニ ヨル コウミツド プラズマ セイセイ

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Abstract

  We found high-density plasma generated by microwaves propagating along metal surface at a negative voltage against a grounded chamber. Magnetic probe measurement showed that 2.45-GHz microwaves propagated as surface waves that were guided by the interface between the high-density plasma and underdense region in ion sheath surrounding the metal surface. The same phenomenon was demonstrated to occur in a narrow metal tube 7.5 mm in inner diameter, where surface waves were considered to propagate along the interface between a high-density plasma column in the tube and underdense region in ion sheath formed along the inner wall of the tube.<br>

Journal

  • Shinku

    Shinku 49 (3), 183-185, 2006

    The Vacuum Society of Japan

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