Relationship between Compression Process and the Ultimate Pressure of a Scroll Vacuum Pump.

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Other Title
  • スクロール真空ポンプの圧縮過程と到達圧力の関係
  • スクロール シンクウ ポンプ ノ アッシュク カテイ ト トウタツ アツリョク ノ カンケイ

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Description

Our previous analysis of the performance of a scroll vacuum pump assumed the isothermal compression process of the pump. It gave approximately the same ultimate pressures for air and argon as the measured ultimate pressures, but the predicted ultimate pressure for helium was an order of magnitude higher than the measured ultimate pressure. We adopted the adiabatic compression process in this paper to investigate how the compression process would change the ultimate pressure. The effects of the molecular weight and diameter on the ultimate pressure were also investigated. The results of the analysis stated that the ultimate pressure for helium was in the same order of magnitude as the measured ultimate pressure. The ultimate pressure changes with the molecular weight and diameter for light molecules.

Journal

  • Shinku

    Shinku 44 (3), 163-166, 2001

    The Vacuum Society of Japan

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