書誌事項
- タイトル別名
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- Relationship between Compression Process and the Ultimate Pressure of a Scroll Vacuum Pump.
- スクロール シンクウ ポンプ ノ アッシュク カテイ ト トウタツ アツリョク ノ カンケイ
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説明
Our previous analysis of the performance of a scroll vacuum pump assumed the isothermal compression process of the pump. It gave approximately the same ultimate pressures for air and argon as the measured ultimate pressures, but the predicted ultimate pressure for helium was an order of magnitude higher than the measured ultimate pressure. We adopted the adiabatic compression process in this paper to investigate how the compression process would change the ultimate pressure. The effects of the molecular weight and diameter on the ultimate pressure were also investigated. The results of the analysis stated that the ultimate pressure for helium was in the same order of magnitude as the measured ultimate pressure. The ultimate pressure changes with the molecular weight and diameter for light molecules.
収録刊行物
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- 真空
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真空 44 (3), 163-166, 2001
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282679040983552
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- NII論文ID
- 10007388493
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 5738928
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDLサーチ
- Crossref
- CiNii Articles
- OpenAIRE
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- 抄録ライセンスフラグ
- 使用不可
