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- 田沼 繁夫
- 日本鉱業(株)総合研究所
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- POWELL C. J.
- National Institute of Standards and Technology, Gaithersburg
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- PENN D. R.
- National Institute of Standards and Technology, Gaithersburg
書誌事項
- タイトル別名
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- Dependence of electron inelastic mean free paths on electron energy and materials at low energy region. I: Elements.
- テイ エネルギー リョウイキ ニ オケル デンシ ノ ヒ ダンセイ ヘイキン
- I : Elements
- I.元素について
この論文をさがす
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We have proposed a general formula of electron inelastic mean free path (IMFP) to describe the calculated IMFPs over the 50-2000 eV energy range based on the Inokuti's modified Bethe formula for the inelastic scattering cross sec-tion. The IMFPs for 50-2000 eV electrons in 27 elements were calculated using Penn's algorithm. The IMFP dependence on electron energy in the range 50-200 eV varies considerably from materal to material. These variations are associated with substantial differences in the electron energy-loss functions amongst the material. We also found that the modified Bethe formula by Inokuti could be fitted to the calculated IMFPs in the range 50-2000 eV within 3% relative error.
収録刊行物
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- 真空
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真空 33 (2), 58-62, 1990
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282679041346816
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- NII論文ID
- 130000862940
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 3649187
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- 本文言語コード
- ja
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- データソース種別
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- JaLC
- NDL
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- 抄録ライセンスフラグ
- 使用不可