Differential-pressure Seal Mechanism of Air-to-Air Type Continuous Ion Plating Apparatus.

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Other Title
  • 連続イオンプレーティング装置の差圧気密機構
  • レンゾク イオン プレーティング ソウチ ノ サアツ キミツ キコウ

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Description

A new method of differential-pressure sealing of the air-to-air type (pilot line) continuous hollow cathode discharge (HCD) plasma coating line was developed. The characteristic features of the air-to-air type sealing apparatus include (1) coupled sealing structure consisting of a single guide roller and a seal attachment, (2) specially designed seal attachment structure for wrapping thin sheets around a guide roller, thereby enabling the accomplishment of a good differential-pressure seal, and (3) the six chambers made of the step-by-step differential-pressure seal stages.<BR>This continuous air-to-air line differential-pressure seal apparatus is considerably free from vibration and noise components due to the formation of a smooth seal on the steel sheet. It is possible to accomplish a stable high vacuum of 0.066 Pa for a long duration. In comparison to other typical differential-pressure seal apparatuses this apparatus exhibits the most superior sealing operation.

Journal

  • Shinku

    Shinku 41 (8), 703-708, 1998

    The Vacuum Society of Japan

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