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- UCHIDA Yoshiyuki
- Department of Electronic Engineering, Aichi Institute of Technology
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- KANIE Tetsuo
- Department of Electronic-Mechanical Engineering, Nagoya University
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- SAGO Masatoshi
- Department of Electronic-Mechanical Engineering, Nagoya University
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- HORI Masaru
- Department of Electronic-Mechanical Engineering, Nagoya University
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- HATTORI Shuzo
- Department of Electronic-Mechanical Engineering, Nagoya University
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- MATSUI Keiji
- Okuma Machinery Works Ltd.
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- OHTSUKA Toshitsugu
- Showa Shinku Co. Ltd.
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- NAGAMATSU Yohsuke
- Showa Shinku Co. Ltd.
Bibliographic Information
- Other Title
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- ４そう回転型プラズマ成膜現像電子線真空リソグラフィ装置
- 4ソウ カイテンガタ プラズマ セイ マク ゲンゾウ デンシセン シンクウ リ
Search this article
Abstract
記事分類: 電気工学--電子工学--集積回路
Journal
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- Shinku
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Shinku 29 (5), 424-428, 1986
The Vacuum Society of Japan
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Keywords
Details 詳細情報について
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- CRID
- 1390282679041894784
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- NII Article ID
- 130000864896
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- NII Book ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL BIB ID
- 3079134
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- Text Lang
- ja
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- Data Source
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- JaLC
- NDL
- Crossref
- CiNii Articles