Improvement of Frictional Property of Copper-Boron Nitride Complex by Excimer Laser Irradiation.

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  • GOTO Masahiro
    Nanomaterials Laboratory, National Institute for Materials Science
  • KASAHARA Akira
    Nanomaterials Laboratory, National Institute for Materials Science
  • TOSA Masahiro
    Nanomaterials Laboratory, National Institute for Materials Science
  • YOSHIHARA Kazuhiro
    Nanomaterials Laboratory, National Institute for Materials Science

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Other Title
  • エキシマレーザー照射による銅窒化ホウ素混合薄膜の摩擦特性改善
  • ソクホウ エキシマレーザー ショウシャ ニ ヨル ドウ チッカ ホウソ コンゴウ ハクマク ノ マサツ トクセイ カイゼン

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Abstract

Low frictional coating films made of copper and boron nitride complex on a stainless steel substrate were successfully synthesized by magnetron co-sputter deposition with excimer laser irradiation. Frictional property of the films was observed by a vacuum friction measuring apparatus. The film properties were also obtained by a scanning auger electron spectroscopy, a Vikers hardness measuring apparatus and a contact angle measuring appatatus. Surface energy and film hardness were also modified by the laser irradiation. Friction coefficients as low as 0.075 under ultra-high vacuum conditions were achieved after irradiating the films.

Journal

  • Shinku

    Shinku 45 (12), 858-861, 2002

    The Vacuum Society of Japan

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