Silicon Single Crystal Wafer Holder with a Cold Trap and a Direct Current Heating Mechanism Mounted on a Conflat Flange with an Outer Diameter of 70 mm

DOI Web Site 5 Citations 12 References
  • KOBAYASHI Eiichi
    Institute of Materials Structure Science, KEK Polymer Electrolyte Fuel Cell Cutting-Edge Research Center, AIST Tokyo Waterfront Center
  • NAMBU Akira
    Institute of Materials Structure Science, KEK Chemistry Department, Brookhaven National Laboratory
  • KAKIUCHI Takuhiro
    The Graduate University for Advanced Studies
  • MASE Kazuhiko
    Institute of Materials Structure Science, KEK The Graduate University for Advanced Studies PRESTO, Japan Science and Technology Agency

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Other Title
  • ７０ｍｍコンフラットフランジマウント型加熱冷却機構付きシリコン単結晶ホルダー
  • 70mm コンフラットフランジマウントガタ カネツ レイキャク キコウ ツキ シリコンタンケッショウ ホルダー

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Description

  We introduce a silicon single crystal wafer holder with a cold trap and a direct current heating mechanism mounted on a conflat flange with an outer diameter of 70 mm. It consists of 300-ml cold trap, tantalum electrodes for direct-current heating and commercial electrical feedthroughs. A silicon single crystal with a size of 30×5×0.5 mm can be heated to >1100 °C by direct heating, and can be cooled down to <100 K with liquid nitrogen.<br>

Journal

  • Shinku

    Shinku 50 (1), 57-59, 2007

    The Vacuum Society of Japan

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