An Overview of Magnetron Plasma Polymerization for the Most Successful Industrial Scale Operation of Plasma Polymerization
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- YASUDA Hirotsugu
- Center for Surface Science and Plasma Technology Department of Chemical Engineering University of Missouri-Columbia
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Magnetron-AF (e.g., 15 kHz) plasma polymerization with a coaxial circular arrangement of magnetic field has a unique advantage that no deposition occurs onto a part of electrode surface corresponding to the toroidal glow, which enable us to operate the stable magnetron plasma polymerization continuously for a long period of time. Together with the confined glow that remarkably reduces the contamination of the reactor; the magnetron plasma polymerization has been shown to be one of the most effective modes of plasma polymerization in industrial scale operation. When the magnetron plasma polymerization is used in laboratory experiments, successful operations can be easily scaled up to industrial scale operations by maintaining parameters of the magnetron discharge and, if necessary, increasing the number of discharge units, in stead of enlarging the discharge unit.<br>
収録刊行物
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- 真空
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真空 50 (10), 598-600, 2007
一般社団法人 日本真空学会
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詳細情報 詳細情報について
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- CRID
- 1390282679042905856
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- NII論文ID
- 10019784207
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- NII書誌ID
- AN00119871
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- ISSN
- 18809413
- 05598516
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- NDL書誌ID
- 9265800
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- 本文言語コード
- en
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- データソース種別
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- JaLC
- NDL
- Crossref
- CiNii Articles
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- 抄録ライセンスフラグ
- 使用不可