Bi蒸着膜の断面構造とその現象論的解析

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書誌事項

タイトル別名
  • Cross-Sectional Structure of Bi Films and Its Phenomenalistic Analysis
  • Bi ジョウチャク マク ノ ダンメン コウゾウ ト ソノ ゲンショウロンテキ カイセキ

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説明

The cross-sectional structure of evaporated Bi films has been investigated electron-microscopically by means of the replica technique. Films were prepared with changing the evaporation conditions : substrate temperature, residual gas pressure and deposition rate. The influence of deposition rate appears most conspicuously at the thickness where the film becomes continuous. The structure of the film surface is essentially determined at this stage. Based on these results, the phenomenalistic treatment was also made by assuming that the deformation of surface takes place due to the surface diffusion of evaporated atoms. It has been shown that the theoretical result as a function of temperature and deposition rate agrees well with the experimental one.

収録刊行物

  • 真空

    真空 16 (2), 62-68, 1973

    一般社団法人 日本真空学会

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